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Ultrasonic Optical Wafer Atomizing Spray Nozzle For Ceramic Coating

Ultrasonic Optical Wafer Atomizing Spray Nozzle For Ceramic Coating

    • Ultrasonic Optical Wafer Atomizing Spray Nozzle For Ceramic Coating
    • Ultrasonic Optical Wafer Atomizing Spray Nozzle For Ceramic Coating
  • Ultrasonic Optical Wafer Atomizing Spray Nozzle For Ceramic Coating

    Product Details:

    Place of Origin: China
    Brand Name: HC-SONIC
    Model Number: HC-AT50

    Payment & Shipping Terms:

    Minimum Order Quantity: 1 Set
    Price: negotiation
    Packaging Details: FOAM AND CARTON
    Delivery Time: 5days
    Payment Terms: T/T, Western Union, MoneyGram, paypal
    Supply Ability: 500 Set per month
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    Detailed Product Description
    Name: Ultrasonic Nano-spray Frequency: 50Khz
    Power: 100W Generatr: HC-AT-500 GENERATOR
    Atomization Volume: 0.1~200 L/H Application: Aeramic Coating

    Low viscosity ultra-Thin Coating ultrasonic spray nozzle with automated machine


    Offered both in standalone or as a drop in module for one of our cluster tools, our ultrasonic coating system is able to more uniformly coat substrates with complex structures that may have high levels of varying topography.
    Using a ultrasonic signal generator, our coating system will mist the desired chemistries using parameters finely calibrated to the specific physical properties of the photoresist. Compressed nitrogen is used not as a propellant of the solution, but solely as a shaping spray to direct the photoresist atomized by the ultrasonic frequencies. This results in a much more uniform coating for complex geometries and topographic substrates, and requires a greatly reduced amount photoresist than traditional checmical coating methods.





    Model HC-AN50
    Frequency 50Khz
    Atomization Volume 0.1~200 L/H
    Average Particle Diameter of Fog 5~80um
    Power Consumption 0.001 Degrees/Kg
    Atomization Head Structure Horn
    Power 100 W~500 W
    The Application of Atomizing Media Ordinary water, a variety of liquid substances, chemical liquid,a variety of oil mucus, metal melt and so on



    In immersion nano-lithography, nanostructures are written on a wafer by illumination through a 200 µm thin water film that sits locally between the imaging lens and the wafer that scans horizontally at speeds up to 1 m/s. One of the important defect mechanisms in immersion lithography is the formation of air bubbles that enter the light path underneath the lens. Our combined numerical and experimental work shows that the micro-bubbles can be manipulated using ultrasonic waves, so that they can be prevented from reaching the light path during lithography. For our particular experimental conditions, micro-bubbles with radii between 25 and 100 µm can be stopped or deflected for scanning speeds up to at least 0.6 µm/s.

    Acoustically driven micro-bubbles can be used to advantage in micro-fluidic devices, for example for mixing [1], controlled drug delivery [2], surface cleaning [3], or poration of cell membranes [4]. Micro-fluidic devices can also be used to generate well-defined micro-bubbles, for example for use as contrast agents in medical imaging [5]. In nano-imaging industrial applications such as immersion lithography the presence of micro-bubbles poses an important risk since these may cause a distortion of nano-sized imaged structures on semiconductor wafers leading to failure of integrated circuits. Especially, the required high accuracies of next generation lithography tools demand avoidance of any micro-bubble entering the optical path in the thin liquid layer between the lens and the scanning wafer. The approach being taken in this paper is to use ultrasound to prevent micro-bubbles from entering the light path during the imaging process. It is well known that micro-bubbles suspended in a liquid can be manipulated using ultrasound [6]. The special challenge in our case is the fact that we are dealing with bubbles attached to a substrate, and that the transportation speed of bubbles needs to be high because of the wafer scanning speed of up to 1 m/s. The effect of ultrasound and the optimal parameter set as to frequency and amplitude at this scale on sessile bubbles have not sufficiently been investigated previously


    Both the experiments and the simulations show that micro-bubbles can be stopped from moving with the substrate to which they are attached, and are kept steady or deflected from a central region by the ultrasonic field with a carefully chosen parameter set. For our particular experimental conditions, micro-bubbles with radii between 25 and 100 μm can be stopped or deflected for scanning speeds up to at least 0.6 m/s. These proof-of-concept results indicate that ultrasound offers an effective option to prevent micro-bubble related defects in immersion lithography, and more generally that ultrasound provides an effective way to transport micro-bubbles across surfaces. 

    Fabrics can be utilized not only for clothing, furnishing, and décor, but also bandaging and wound dressing, industrial conveyor belts, and equipment or protective coverings. Fabrics and textiles can be coated with adhesives, as well as weather-, wear-, and/or stain-resistant (such as hydro- or oleo-phobic) coatings, fire resistant or retardant coatings, or anti-fouling and/or anti-microbial coatings.

    Ultrasonic spray nozzles utilized with dovetail spray shapers are an excellent choice for a variety of fabric coatings. Automated coating systems incorporating one or more rows of dovetail-nozzle combinations with a conveyor belt system can be built or designed by ultrasonic  spray nozzle for continuous production runs on an industrial scale. Prototype or benchtop automated systems can be purchased from ultrasonic automize as well to facilitate small-scale runs or fabric coating research and development, and further developed and scaled later on using HC-SONIC equipment, design, and expertise as well.




    Ultrasonic nozzle benefits:

    •Spray patterns are easily shaped for precise coating applications

    •Highly controllable spray produces reliable, consistent results

    •Corrosion-resistant titanium and stainless steel construction

    •Ultra-low flow rate capabilities, intermittent or continuous

    •No moving parts to wear out


    •Drops sizes as small as 13 microns, depending upon nozzle frequency

    •reduce downtime in critical manufacturing processes


    Ultrasonic spray technology is used to coat practically any substrate shape, size or surface with uniform micron thick coatings, and even nano-coating thicknesses. In addition, ultrasonic technology is used for:


    •Spray drying

    •Continuous web coating

    •Fine-line spraying


    •Nanosuspension dispersion



    Available in 30kHz & 50kHz frequencies

    • Fuel Cell Coatings
    • Conductive Coatings (EMI Shield)
    • Fluxes
    • Photoresists
    • Polyimides
    • Conformal Coatings – Acrylic & Urethane
    • Other low viscosity solutions and suspensions




    Ultrasonic Optical Wafer Atomizing Spray Nozzle For Ceramic Coating


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