Hangzhou Jiazhen Ultrasonic Technology Co.,Ltd

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XYZ motion Ultrasonic spray system for thin film solar cell coating

XYZ motion Ultrasonic spray system for thin film solar cell coating

    • XYZ motion Ultrasonic spray system for thin film solar cell coating
    • XYZ motion Ultrasonic spray system for thin film solar cell coating
  • XYZ motion Ultrasonic spray system for thin film solar cell coating

    Product Details:

    Place of Origin: China
    Brand Name: HC-SONIC
    Model Number: HC-AT50

    Payment & Shipping Terms:

    Minimum Order Quantity: 1 Set
    Price: negotiation
    Packaging Details: FOAM AND CARTON
    Delivery Time: 5days
    Payment Terms: T/T, Western Union, MoneyGram, paypal
    Supply Ability: 500 Set per month
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    Detailed Product Description
    Name: Ultrasonic Spray System Frequency: 30~120Khz
    Power: 100W Auxiliary Equipment: Cooling Equipment, Precision Syringe Pump
    Atomization Volume: 0.1~200 L/H Application: Precision Coating

    XYZ motion Ultrasonic spray system for thin film solar cell coating

    Descripersion:

    Ultrasonic spray coating system includes XYZ motion system, ultrasonic spray nozzle, ultrasonic generator, constant liquid delivery system and air control. HC-SONIC's ultrasonic spray nozzle, with a variety of frequencies and plume shaping attachments to suit the applications. High efficiency spray, the material usage ratio > 95%, Spray pattern uniformity +/- 2%. Maximum spray area coverage: 500mm x 500mm. Equipped with Precision Syringe Pump Liquid Dosing/Dispensing and full digital ultrasonic generator.

    The ultrasonic spray coating technology is widely used in thin film solar cell, solar panel glass, PEM fuel cell,implantable medical devices, in vitro diagnostics, HIFU medical equipment, infusion and dialysis equipment ,semiconductor, PCB fluxing, sensors, display, nano thin films, nano powders, nano wires etc.

     

     

    Frequency 30~120khz Power 10~100w
    Evenness <5% Liquid Utilization rate >94%
    Thickness 20nm~100um Viscosity <30cps
    Temperature 1~60C Motion XYZ motion

    Theory

    In immersion nano-lithography, nanostructures are written on a wafer by illumination through a 200 µm thin water film that sits locally between the imaging lens and the wafer that scans horizontally at speeds up to 1 m/s. One of the important defect mechanisms in immersion lithography is the formation of air bubbles that enter the light path underneath the lens. Our combined numerical and experimental work shows that the micro-bubbles can be manipulated using ultrasonic waves, so that they can be prevented from reaching the light path during lithography. For our particular experimental conditions, micro-bubbles with radii between 25 and 100 µm can be stopped or deflected for scanning speeds up to at least 0.6 µm/s.

    Acoustically driven micro-bubbles can be used to advantage in micro-fluidic devices, for example for mixing , controlled drug delivery , surface cleaning , or poration of cell membranes . Micro-fluidic devices can also be used to generate well-defined micro-bubbles, for example for use as contrast agents in medical imaging . In nano-imaging industrial applications such as immersion lithography the presence of micro-bubbles poses an important risk since these may cause a distortion of nano-sized imaged structures on semiconductor wafers leading to failure of integrated circuits. Especially, the required high accuracies of next generation lithography tools demand avoidance of any micro-bubble entering the optical path in the thin liquid layer between the lens and the scanning wafer. The approach being taken in this paper is to use ultrasound to prevent micro-bubbles from entering the light path during the imaging process. It is well known that micro-bubbles suspended in a liquid can be manipulated using ultrasound [6]. The special challenge in our case is the fact that we are dealing with bubbles attached to a substrate, and that the transportation speed of bubbles needs to be high because of the wafer scanning speed of up to 1 m/s. The effect of ultrasound and the optimal parameter set as to frequency and amplitude at this scale on sessile bubbles have not sufficiently been investigated previously

     

    Both the experiments and the simulations show that micro-bubbles can be stopped from moving with the substrate to which they are attached, and are kept steady or deflected from a central region by the ultrasonic field with a carefully chosen parameter set. For our particular experimental conditions, micro-bubbles with radii between 25 and 100 μm can be stopped or deflected for scanning speeds up to at least 0.6 m/s. These proof-of-concept results indicate that ultrasound offers an effective option to prevent micro-bubble related defects in immersion lithography, and more generally that ultrasound provides an effective way to transport micro-bubbles across surfaces. 

    Advantage

    Ultrasonic nozzle benefits:

     

    • Coating thickness controlled accuracy
    • 4 times raw material utilization
    • Corrosion resistant, no noise, no blockage
    • The atomized particles uniform, Thin, controllable

     

    Available in 30kHz ~120kHz frequencies

    • Fuel Cell Coatings
    • Conductive Coatings (EMI Shield)
    • Fluxes
    • Photoresists
    • Polyimides
    • Conformal Coatings – Acrylic & Urethane
    • Other low viscosity solutions and suspensions

     

     

     

    XYZ motion Ultrasonic spray system for thin film solar cell coating

    HC-SONIC UltrasonicProduct Brochure.pdf

    Contact Details
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