Views: 0 Author: Site Editor Publish Time: 2024-10-08 Origin: Site
Photolithography refers to the technology of transferring the pattern on the mask to the substrate with the help of photoresist (also known as photoresist) under the action of light. In the photolithography process, photoresist coating is an important technical link.
The existing coating methods of photoresist mainly include spin coating and spraying.
The ultrasonic atomization spray coating method can be flexibly applied to substrates of various surface types, and can be used for coating of flat substrates and curved substrates. It also has the characteristics of saving photoresist, strong repeatability, good coating uniformity, and easy control of coating thickness and roughness. After years of research and experiment on ultrasonic waves, Changzhou Jingxin Semiconductor Equipment Co., Ltd. has launched ultrasonic spraying equipment for photoresist atomization spraying.
Ultrasonic atomization spraying can produce micron-level photoresist droplets through the ultrasonic oscillation of the ultrasonic nozzle, which can reduce the influence of photoresist fluid dynamics. During the spraying process, the wafer rotates slowly while the swing arm moves across the entire wafer. The lower rotation speed can reduce the influence of centrifugal force. At the same time, this rotation also allows the photoresist to completely cover all angles of the entire deep hole.
Ultrasonic spraying of photoresist can save 70% of photoresist solution compared to the centrifugal coating method. The reproducibility is also relatively high. For all wafers with holes of the same size, the thickness of the photoresist is reproducible regardless of the location of the holes. There is no directional effect in the spraying process, and the uniformity is also higher. The ultrasonic spraying process is not limited by the underlying material and can be applied to both insulators and conductor layers. These advantages are beneficial to the application of ultrasonic atomization spraying in commercial production.
